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This book presents a concise summary of the widespread aspects of various fundamentals and applications of micro mechatronics. The technique of nano mechatronics has widespread applications across multiple spheres like sensors, automobiles and machinery. Its present day utilization has extended to aerospace equipment, biomedical apparatus, water engineering and other such emerging fields. Essentially, the technology for miniaturization is critical for achieving high performance and low consumption of resources, giving rise to small space instrumentation. This book presents a summary on the research work carried out at Center of Excellence for Education and Research of Micro-Nano Mechatronics. The research work has created a means to create multiple applications of micro-nano mechatronics, on the basis of mechanical engineering, control systems engineering, and advanced medical engineering. Various topics in this book talk about advancements in research on nano measurement and control, designing and manufacture, and their applications in the field of biomedical equipment.